APA (7th ed.) Citation

Iwata, T., & Naka, Y. (1993). Introduction to VLSI process engineering ([1st ed.].). Chapman and Hall.

Chicago Style (17th ed.) Citation

Iwata, Tomonori, and Y. Naka. Introduction to VLSI Process Engineering. [1st ed.]. London: Chapman and Hall, 1993.

MLA (9th ed.) Citation

Iwata, Tomonori, and Y. Naka. Introduction to VLSI Process Engineering. [1st ed.]. Chapman and Hall, 1993.