Film deposition by plasma techniques /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer,
1992
|
| Edition: | [1st ed.] |
| Series: | Series on atoms and plasmas
Vol. 10 |
| Subjects: | |
| ISBN: | 3540540571 |
| Online Access: |
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