APA (7th ed.) Citation

Konuma, M. (1992). Film deposition by plasma techniques ([1st ed.].). Springer.

Chicago Style (17th ed.) Citation

Konuma, Mitsuharu. Film Deposition by Plasma Techniques. [1st ed.]. Berlin: Springer, 1992.

MLA (9th ed.) Citation

Konuma, Mitsuharu. Film Deposition by Plasma Techniques. [1st ed.]. Springer, 1992.