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An Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz

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Title: An Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz
Authors: Mubarak, Faisal, Phung, Gia Ngoc, Arz, Uwe, Haddadi, Kamel, Roch-Jeune, Isabelle, Ducournau, Guillaume, Flisgen, Thomas, Doerner, Ralf, Allal, Djamel, Jayasankar, Divya, 1994, Stake, Jan, 1971, Schmidt, Robin, Fisher, Gavin, Ridler, Nick, Shang, Xiaobang
Source: IEEE Transactions on Terahertz Science and Technology. 15(3):344-358
Subject Terms: Calibration, coplanar waveguides (CPW), comparison, Terahertz metrology, on-wafer, S-parameter measurements
Description: This paper reports on an interlaboratory measurement comparison involving on-wafer S-parameter measurements from 10 GHz to 1.1 THz. Seven laboratories are involved, and each participant has measured an individual reference substrate fabricated from a high-resistivity silicon wafer in the same batch. One- and two-port co-planar waveguide (CPW) structures are designed, simulated, and fabricated. The measurements from 10 GHz to 1.1 THz, extending across six frequency bands, are conducted using different equipment in terms of vendors and specifications (e.g., probe pitch size). Despite such differences, this interlaboratory study has shown a generally good agreement between results from different participants when uncertainties are considered. The comparison with simulated reference values demonstrates agreement within 0.08 for |S11| and 2 dB for |S21| measurements of matched devices up to 1.1 THz. The measurement comparison demonstrates the need for a standardized measurement approach and, with that, a potential to achieve accurate on-wafer CPW measurements up to THz frequencies, underpinning the development of integrated circuits for such high frequencies.
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  Data: An Interlaboratory Comparison of On-Wafer S-Parameter Measurements up to 1.1 THz
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  Data: <searchLink fieldCode="AR" term="%22Mubarak%2C+Faisal%22">Mubarak, Faisal</searchLink><br /><searchLink fieldCode="AR" term="%22Phung%2C+Gia+Ngoc%22">Phung, Gia Ngoc</searchLink><br /><searchLink fieldCode="AR" term="%22Arz%2C+Uwe%22">Arz, Uwe</searchLink><br /><searchLink fieldCode="AR" term="%22Haddadi%2C+Kamel%22">Haddadi, Kamel</searchLink><br /><searchLink fieldCode="AR" term="%22Roch-Jeune%2C+Isabelle%22">Roch-Jeune, Isabelle</searchLink><br /><searchLink fieldCode="AR" term="%22Ducournau%2C+Guillaume%22">Ducournau, Guillaume</searchLink><br /><searchLink fieldCode="AR" term="%22Flisgen%2C+Thomas%22">Flisgen, Thomas</searchLink><br /><searchLink fieldCode="AR" term="%22Doerner%2C+Ralf%22">Doerner, Ralf</searchLink><br /><searchLink fieldCode="AR" term="%22Allal%2C+Djamel%22">Allal, Djamel</searchLink><br /><searchLink fieldCode="AR" term="%22Jayasankar%2C+Divya%22">Jayasankar, Divya</searchLink>, 1994<br /><searchLink fieldCode="AR" term="%22Stake%2C+Jan%22">Stake, Jan</searchLink>, 1971<br /><searchLink fieldCode="AR" term="%22Schmidt%2C+Robin%22">Schmidt, Robin</searchLink><br /><searchLink fieldCode="AR" term="%22Fisher%2C+Gavin%22">Fisher, Gavin</searchLink><br /><searchLink fieldCode="AR" term="%22Ridler%2C+Nick%22">Ridler, Nick</searchLink><br /><searchLink fieldCode="AR" term="%22Shang%2C+Xiaobang%22">Shang, Xiaobang</searchLink>
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  Data: <i>IEEE Transactions on Terahertz Science and Technology</i>. 15(3):344-358
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  Data: <searchLink fieldCode="DE" term="%22Calibration%22">Calibration</searchLink><br /><searchLink fieldCode="DE" term="%22coplanar+waveguides+%28CPW%29%22">coplanar waveguides (CPW)</searchLink><br /><searchLink fieldCode="DE" term="%22comparison%22">comparison</searchLink><br /><searchLink fieldCode="DE" term="%22Terahertz+metrology%22">Terahertz metrology</searchLink><br /><searchLink fieldCode="DE" term="%22on-wafer%22">on-wafer</searchLink><br /><searchLink fieldCode="DE" term="%22S-parameter+measurements%22">S-parameter measurements</searchLink>
– Name: Abstract
  Label: Description
  Group: Ab
  Data: This paper reports on an interlaboratory measurement comparison involving on-wafer S-parameter measurements from 10 GHz to 1.1 THz. Seven laboratories are involved, and each participant has measured an individual reference substrate fabricated from a high-resistivity silicon wafer in the same batch. One- and two-port co-planar waveguide (CPW) structures are designed, simulated, and fabricated. The measurements from 10 GHz to 1.1 THz, extending across six frequency bands, are conducted using different equipment in terms of vendors and specifications (e.g., probe pitch size). Despite such differences, this interlaboratory study has shown a generally good agreement between results from different participants when uncertainties are considered. The comparison with simulated reference values demonstrates agreement within 0.08 for |S11| and 2 dB for |S21| measurements of matched devices up to 1.1 THz. The measurement comparison demonstrates the need for a standardized measurement approach and, with that, a potential to achieve accurate on-wafer CPW measurements up to THz frequencies, underpinning the development of integrated circuits for such high frequencies.
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      – SubjectFull: coplanar waveguides (CPW)
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      – SubjectFull: comparison
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      – SubjectFull: Terahertz metrology
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      – SubjectFull: on-wafer
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