Role of sputtered atom and ion energy distribution in films deposited by physical vapor deposition: A molecular dynamics approach - Atmane, Soumya; Maroussiak, Alexandre; Caillard, Amaël; Thomann, Anne Lise; Kateb, Movaffaq; Gudmundsson, J. T.; Brault, Pascal (Journal of Vacuum Science and Technology A, 2024)