Method and device for generating (quasi-) periodic interference patterns
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| Title: | Method and device for generating (quasi-) periodic interference patterns |
|---|---|
| Patent Number: | 11555,745 |
| Publication Date: | January 17, 2023 |
| Appl. No: | 17/224466 |
| Application Filed: | April 07, 2021 |
| Abstract: | Example embodiments relate to methods and devices for generating (quasi-) periodic interference patterns. One embodiment includes a method for generating an interference pattern using multi-beam interference of electromagnetic radiation. The method includes computing a set of grid points in a complex plane representing a grid with a desired symmetry. The method also includes selecting a radius of a virtual circle. Additionally, the method includes selecting a set of grid points in the complex plane that lies on the virtual circle centered around a virtual center point. Further, the method includes associating an argument of each grid point of the selected set of grid points in the complex plane with a propagation direction of plane waves or quasi plane waves or parallel wave fronts. In addition, the method includes obtaining the interference pattern that is a superposition of the plane waves or quasi plane waves or parallel wave fronts. |
| Inventors: | IMEC VZW (Leuven, BE); Katholieke Universiteit Leuven, KU LEUVEN R&D (Leuven, BE) |
| Assignees: | IMEC VZW (Leuven, BE), Katholieke Universiteit Leuven, KU Leuven R&D (Leuven, BE) |
| Claim: | 1. A method comprising: computing a set of grid points in a complex plane representing a grid with a desired symmetry; selecting a radius of a virtual circle; selecting a set of grid points in the complex plane that lies on the virtual circle centered around a virtual center point; associating an argument of each grid point of the selected set of grid points in the complex plane with a propagation direction of plane waves or quasi plane waves or parallel wave fronts; obtaining an interference pattern that is a superposition of the plane waves or quasi plane waves or parallel wave fronts; and providing input beams of electromagnetic radiation to a plurality of electromagnetic radiation input ports such that the obtained interference pattern is generated using multi-beam interference of electromagnetic radiation. |
| Claim: | 2. The method according to claim 1 , wherein the plane waves or quasi plane or parallel wave fronts are modulated by shifting a phase angle. |
| Claim: | 3. The method according to claim 1 , further comprising: calculating the electromagnetic radiation intensity of the interference pattern; and determining if the calculated intensity pattern has a desired symmetry, sideband suppression, or distance between the interference spots. |
| Claim: | 4. The method according to claim 1 , further comprising tuning the symmetry of the array of grid points to obtain a desired symmetry of the interference spot positions. |
| Claim: | 5. The method according to claim 1 , further comprising tuning the radius of the virtual circle in the complex plane to obtain a desired distancing of the interference spots. |
| Claim: | 6. The method according to claim 1 , further comprising arranging at least partially coherent input beams of electromagnetic radiation such that they have a direction of the wavefront that is the argument of the selected grid points on the selected virtual circle. |
| Claim: | 7. The method according claim 1 , further comprising: manipulating the illumination spots by tuning the angle of incidence of the input beams; or modulating of phases or amplitude of the input beams. |
| Claim: | 8. The method according to claim 1 , further comprising determining phase shifts of the input beams by multiplying the projection of each selected grid point, corresponding to an orientation angle of each of the input beams, on an axis perpendicular to a desired direction of an intended translation of the interference pattern by the magnitude of the intended translation. |
| Claim: | 9. The method according to claim 1 , further comprising changing the interference pattern dynamically. |
| Claim: | 10. The method according to claim 2 , further comprising tuning the phase of the plane waves or quasi plane waves or parallel wave fronts, as to give them a helical phase to obtain an annular interference spot. |
| Claim: | 11. The method according to claim 1 , wherein the virtual circle is a virtual sphere and the complex plane is a three-dimensional space and the interference pattern is a three-dimensional interference pattern of interference spots. |
| Claim: | 12. A non-transitory, computer-readable medium having instructions stored thereon, wherein the instructions, when executed by a processor, cause the processor to carry out the method according to claim 1 . |
| Claim: | 13. A device comprising a plurality of electromagnetic radiation input ports configured to receive input radiation beams and cause the input radiation beams to interfere at a center, which generates an interference pattern, and wherein causing the input radiation beams to interfere at the center comprises: computing a set of grid points in a complex plane representing a grid with a desired symmetry; selecting a radius of a virtual circle; selecting a set of grid points in the complex plane that lies on the virtual circle centered around a virtual center point; associating an argument of each grid point of the selected set of grid points in the complex plane with a propagation direction of plane waves or quasi plane waves or parallel wave fronts; and obtaining the interference pattern that is a superposition of the plane waves or quasi plane waves or parallel wave fronts. |
| Claim: | 14. The device according to claim 13 , wherein the plurality of light input ports is oriented around an optical waveguide for receiving the input light beams, wherein the electromagnetic radiation input ports are configured to provide waves forming illumination spots by the interference pattern, wherein the illumination spots illuminate a sample, and wherein the virtual center point is aligned with the center of the waveguide and a detector configured to detect light from the illuminated sample above the waveguide. |
| Claim: | 15. The device according to claim 13 , further comprising at least one phase modulator or at least one switch for phase shifting or altering the magnitude of at least one of the input radiation beams, wherein the at least one phase modulator or the at least one switch for phase shifting or altering the magnitude of at least one of the input radiation beams is configured to scan the interference spots. |
| Claim: | 16. The device according to claim 13 , wherein causing the input radiation beams to interfere at the center further comprises changing the interference pattern dynamically. |
| Claim: | 17. The device according to claim 13 , wherein causing the input radiation beams to interfere at the center further comprises modulating the plane waves or quasi plane or parallel wave fronts by shifting a phase angle. |
| Claim: | 18. The device according to claim 13 , wherein causing the input radiation beams to interfere at the center further comprises: calculating the electromagnetic radiation intensity of the interference pattern; and determining if the calculated intensity pattern has a desired symmetry, sideband suppression, or distance between the interference spots. |
| Claim: | 19. The device according to claim 13 , wherein causing the input radiation beams to interfere at the center further comprises tuning the symmetry of the array of grid points to obtain a desired symmetry of the interference spot positions. |
| Claim: | 20. The device according to claim 13 , wherein causing the input radiation beams to interfere at the center further comprises tuning the radius of the virtual circle in the complex plane to obtain a desired distancing of the interference spots. |
| Patent References Cited: | 8259106 September 2012 Dammertz 8351020 January 2013 Sandstrom 9019468 April 2015 Burrow 20070109320 May 2007 Skibak 3581919 December 2019 |
| Other References: | Extended European Search Report and Written Opinion, EP Application No. 20169757.0, dated Nov. 9, 2020, 5 pages. cited by applicant Li, Enbang, Jiangtao Xi, and Joe Chicharo. “Predication of multi-dimensional photonic crystal structures generated by multi-beam interference in holographic lithography.” Smart materials and structures 15, No. 1 (2005): S158. cited by applicant Vala, M., and J. Homola. “Multiple beam interference lithography: A tool for rapid fabrication of plasmonic arrays of arbitrary shaped nanomotifs.” Optics express 24, No. 14 (2016): 15656-15665. cited by applicant Terhalle, Bernd, Andreas Langner, Birgit Päivänranta, and Yasin Ekinci. “Advanced holographic methods in extreme ultraviolet interference lithography.” In Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, vol. 8102, p. 81020V. International Society for Optics and Photonics, 2011. cited by applicant |
| Primary Examiner: | Hansen, Jonathan M |
| Attorney, Agent or Firm: | McDonnell Boehnen Hulbert & Berghoff LLP |
| Accession Number: | edspgr.11555745 |
| Database: | USPTO Patent Grants |
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