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Phononic Crystal Made of Silicon Ridges on a Membrane for Liquid Sensing

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Title: Phononic Crystal Made of Silicon Ridges on a Membrane for Liquid Sensing
Authors: Gueddida, Abdellatif, Zhang, Victor, Y., Carpentier, Laurent, Bonhomme, Jérémy, Bonello, Bernard, Pennec, Yan, Djafari-Rouhani, Bahram
Contributors: Physique - IEMN (PHYSIQUE - IEMN), Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN), Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA), Université catholique de Lille (UCL)-Université catholique de Lille (UCL), Institut des Nanosciences de Paris (INSP), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), Acoustique pour les nanosciences (INSP-E3), Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS), FundingThis work was performed under the framework of the project “Tubular Bell” supported by the National French Agency ANR-18-CE92-0023 and by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under grants VE 483/2-1 and LU 605/22-1., ANR-18-CE92-0023,Tubular Bell,Cristal phononique tubulaire pour l'analyse (bio)chimique en phase liquide(2018)
Source: ISSN: 1424-8220 ; Sensors ; https://hal.science/hal-04086892 ; Sensors, 2023, 23 (4), pp.2080. ⟨10.3390/s23042080⟩.
Publisher Information: CCSD
MDPI
Publication Year: 2023
Subject Terms: acoustic sensor, membrane, dispersion curve, transmission curve, liquid viscosity, defect mode, phononic crystal, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]
Description: International audience ; We propose the design of a phononic crystal to sense the acoustic properties of a liquid that is constituted by an array of silicon ridges on a membrane. In contrast to other concepts, the ridges are immersed in the liquid. The introduction of a suitable cavity in the periodic array gives rise to a confined defect mode with high localization in the cavity region and strong solid–liquid interaction, which make it sensitive to the acoustic properties of the liquid. By using a finite element method simulation, we theoretically study the transmission and cavity excitation of an incident flexural wave of the membrane. The observation of the vibrations of this mode can be achieved either outside the area of the phononic crystal or just above the cavity. We discuss the existence of the resonant modes, as well as its quality factor and sensitivity to liquid properties as a function of the geometrical parameters. The performance of the proposed sensor has then been tested to detect the variation in NaI concentration in a NaI–water mixture.
Document Type: article in journal/newspaper
Language: English
DOI: 10.3390/s23042080
Availability: https://hal.science/hal-04086892
https://hal.science/hal-04086892v1/document
https://hal.science/hal-04086892v1/file/Phononic%20Crystal%20Made%20of%20Silicon%20Ridges%20on%20a%20Membrane%20for%20Liquid%20Sensing.pdf
https://doi.org/10.3390/s23042080
Rights: http://creativecommons.org/licenses/by/ ; info:eu-repo/semantics/OpenAccess
Accession Number: edsbas.CF7C5DB1
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  Data: Phononic Crystal Made of Silicon Ridges on a Membrane for Liquid Sensing
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  Data: <searchLink fieldCode="AR" term="%22Gueddida%2C+Abdellatif%22">Gueddida, Abdellatif</searchLink><br /><searchLink fieldCode="AR" term="%22Zhang%2C+Victor%2C+Y%2E%22">Zhang, Victor, Y.</searchLink><br /><searchLink fieldCode="AR" term="%22Carpentier%2C+Laurent%22">Carpentier, Laurent</searchLink><br /><searchLink fieldCode="AR" term="%22Bonhomme%2C+Jérémy%22">Bonhomme, Jérémy</searchLink><br /><searchLink fieldCode="AR" term="%22Bonello%2C+Bernard%22">Bonello, Bernard</searchLink><br /><searchLink fieldCode="AR" term="%22Pennec%2C+Yan%22">Pennec, Yan</searchLink><br /><searchLink fieldCode="AR" term="%22Djafari-Rouhani%2C+Bahram%22">Djafari-Rouhani, Bahram</searchLink>
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  Data: Physique - IEMN (PHYSIQUE - IEMN)<br />Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 (IEMN)<br />Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA)<br />Université catholique de Lille (UCL)-Université catholique de Lille (UCL)-Centrale Lille-Université de Lille-Centre National de la Recherche Scientifique (CNRS)-Université Polytechnique Hauts-de-France (UPHF)-JUNIA (JUNIA)<br />Université catholique de Lille (UCL)-Université catholique de Lille (UCL)<br />Institut des Nanosciences de Paris (INSP)<br />Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)<br />Acoustique pour les nanosciences (INSP-E3)<br />Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)-Sorbonne Université (SU)-Centre National de la Recherche Scientifique (CNRS)<br />FundingThis work was performed under the framework of the project “Tubular Bell” supported by the National French Agency ANR-18-CE92-0023 and by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under grants VE 483/2-1 and LU 605/22-1.<br />ANR-18-CE92-0023,Tubular Bell,Cristal phononique tubulaire pour l'analyse (bio)chimique en phase liquide(2018)
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  Data: <i>ISSN: 1424-8220 ; Sensors ; https://hal.science/hal-04086892 ; Sensors, 2023, 23 (4), pp.2080. ⟨10.3390/s23042080⟩</i>.
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  Data: 2023
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  Data: <searchLink fieldCode="DE" term="%22acoustic+sensor%22">acoustic sensor</searchLink><br /><searchLink fieldCode="DE" term="%22membrane%22">membrane</searchLink><br /><searchLink fieldCode="DE" term="%22dispersion+curve%22">dispersion curve</searchLink><br /><searchLink fieldCode="DE" term="%22transmission+curve%22">transmission curve</searchLink><br /><searchLink fieldCode="DE" term="%22liquid+viscosity%22">liquid viscosity</searchLink><br /><searchLink fieldCode="DE" term="%22defect+mode%22">defect mode</searchLink><br /><searchLink fieldCode="DE" term="%22phononic+crystal%22">phononic crystal</searchLink><br /><searchLink fieldCode="DE" term="%22[SPI%2ENANO]Engineering+Sciences+[physics]%2FMicro+and+nanotechnologies%2FMicroelectronics%22">[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics</searchLink><br /><searchLink fieldCode="DE" term="%22[PHYS%2EPHYS%2EPHYS-INS-DET]Physics+[physics]%2FPhysics+[physics]%2FInstrumentation+and+Detectors+[physics%2Eins-det]%22">[PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]</searchLink>
– Name: Abstract
  Label: Description
  Group: Ab
  Data: International audience ; We propose the design of a phononic crystal to sense the acoustic properties of a liquid that is constituted by an array of silicon ridges on a membrane. In contrast to other concepts, the ridges are immersed in the liquid. The introduction of a suitable cavity in the periodic array gives rise to a confined defect mode with high localization in the cavity region and strong solid–liquid interaction, which make it sensitive to the acoustic properties of the liquid. By using a finite element method simulation, we theoretically study the transmission and cavity excitation of an incident flexural wave of the membrane. The observation of the vibrations of this mode can be achieved either outside the area of the phononic crystal or just above the cavity. We discuss the existence of the resonant modes, as well as its quality factor and sensitivity to liquid properties as a function of the geometrical parameters. The performance of the proposed sensor has then been tested to detect the variation in NaI concentration in a NaI–water mixture.
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  Data: 10.3390/s23042080
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  Data: https://hal.science/hal-04086892<br />https://hal.science/hal-04086892v1/document<br />https://hal.science/hal-04086892v1/file/Phononic%20Crystal%20Made%20of%20Silicon%20Ridges%20on%20a%20Membrane%20for%20Liquid%20Sensing.pdf<br />https://doi.org/10.3390/s23042080
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      – SubjectFull: membrane
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