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Ultrahighly accurate 3D profilometer

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Title: Ultrahighly accurate 3D profilometer
Authors: Tsutsumi, Hideki, Yoshizumi, Keiichi, Takeuchi, Hiroyuki
Contributors: Wang, Yongtian, Weng, Zhicheng, Ye, Shenghua, Sasian, Jose M.
Source: SPIE Proceedings ; Optical Design and Testing II ; ISSN 0277-786X
Publisher Information: SPIE
Publication Year: 2005
Document Type: conference object
Language: unknown
DOI: 10.1117/12.573774
Availability: https://doi.org/10.1117/12.573774
Accession Number: edsbas.86FAC668
Database: BASE
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  Data: Wang, Yongtian<br />Weng, Zhicheng<br />Ye, Shenghua<br />Sasian, Jose M.
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