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STUDY OF MANUFACTURING DEFECTS IN THE TECHNOLOGY OF MANUFACTURING MOEMS SEMICONDUCTOR SUBSTRATES FOR TECHNICAL AUTOMATION MEANS

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Bibliographic Details
Title: STUDY OF MANUFACTURING DEFECTS IN THE TECHNOLOGY OF MANUFACTURING MOEMS SEMICONDUCTOR SUBSTRATES FOR TECHNICAL AUTOMATION MEANS
Authors: NEVLIUDOV, Igor, CHALA, Olena, TESLIUK, Serhii, OMAROV, Murad
Publisher Information: Zenodo, 2023.
Publication Year: 2023
Subject Terms: technical automation means, defect, technological process, MEMS, MOEMS, substrate, diffusion, defect engineering, 9. Industry and infrastructure
Description: Today, in the context of the widespread use of digital, network and intelligent technologies, and the continuous development of integrated production innovations, major and profound changes are taking place in the philosophy of modern industry development. Such changes set manufacturers the task of automating production process control in real time, which involves creating a single enterprise information space that links together the technological and business levels of enterprise management, while solving many of the most important tasks for an industrial enterprise. Integration of the cyber component allows automating the management of production processes through the use of intelligent mechatronic modules, expert systems and large data sets for production forecasting. In this context, a person controls processes at the physical level through a cybernetic system. At the same time, this system with minimal human involvement allows: automatic control of the vehicle at the physical level, analysis and decision-making in real time. Systems of this type are multilevel. At the lower level, accurate and reliable systems such as microelectromechanical and micro-optomechanical are used. They collect, process, and transmit information in the control of technological systems. The accuracy and durability of MEMS and MOEMS depends on the technology of their manufacture. The aim of this work is to increase the efficiency of control by using proximity sensors based on MEMS and MOEMS as part of technical automation means.
Document Type: Article
Language: English
DOI: 10.5281/zenodo.10370530
DOI: 10.5281/zenodo.10370529
Rights: CC BY
Accession Number: edsair.doi.dedup.....54f197d6af4b9ee4d46134435e39ba6c
Database: OpenAIRE
Description
Abstract:Today, in the context of the widespread use of digital, network and intelligent technologies, and the continuous development of integrated production innovations, major and profound changes are taking place in the philosophy of modern industry development. Such changes set manufacturers the task of automating production process control in real time, which involves creating a single enterprise information space that links together the technological and business levels of enterprise management, while solving many of the most important tasks for an industrial enterprise. Integration of the cyber component allows automating the management of production processes through the use of intelligent mechatronic modules, expert systems and large data sets for production forecasting. In this context, a person controls processes at the physical level through a cybernetic system. At the same time, this system with minimal human involvement allows: automatic control of the vehicle at the physical level, analysis and decision-making in real time. Systems of this type are multilevel. At the lower level, accurate and reliable systems such as microelectromechanical and micro-optomechanical are used. They collect, process, and transmit information in the control of technological systems. The accuracy and durability of MEMS and MOEMS depends on the technology of their manufacture. The aim of this work is to increase the efficiency of control by using proximity sensors based on MEMS and MOEMS as part of technical automation means.
DOI:10.5281/zenodo.10370530