Multi-Agent Deep Reinforcement Learning-Based Collaborative Robot Scheduling for Concurrent Processing Optimization in Semiconductor Cluster Tools
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| Title: | Multi-Agent Deep Reinforcement Learning-Based Collaborative Robot Scheduling for Concurrent Processing Optimization in Semiconductor Cluster Tools |
|---|---|
| Authors: | Minsung Cha, Jongwon Choi, Seoung Bum Kim |
| Source: | Journal of the Korean Institute of Industrial Engineers. 51:288-298 |
| Publisher Information: | Korean Institute of Industrial Engineers, 2025. |
| Publication Year: | 2025 |
| Document Type: | Article |
| Language: | English |
| ISSN: | 2234-6457 1225-0988 |
| DOI: | 10.7232/jkiie.2025.51.4.288 |
| Accession Number: | edsair.doi...........80e5e5e81b68ffac2f10a484149f2245 |
| Database: | OpenAIRE |
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