Multi-Agent Deep Reinforcement Learning-Based Collaborative Robot Scheduling for Concurrent Processing Optimization in Semiconductor Cluster Tools

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Bibliographic Details
Title: Multi-Agent Deep Reinforcement Learning-Based Collaborative Robot Scheduling for Concurrent Processing Optimization in Semiconductor Cluster Tools
Authors: Minsung Cha, Jongwon Choi, Seoung Bum Kim
Source: Journal of the Korean Institute of Industrial Engineers. 51:288-298
Publisher Information: Korean Institute of Industrial Engineers, 2025.
Publication Year: 2025
Document Type: Article
Language: English
ISSN: 2234-6457
1225-0988
DOI: 10.7232/jkiie.2025.51.4.288
Accession Number: edsair.doi...........80e5e5e81b68ffac2f10a484149f2245
Database: OpenAIRE
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