Bibliographische Detailangaben
| Titel: |
Integrated Circuit Wafer Detection Based on Intelligent Information Processing |
| Autoren: |
Qing Liu, Limin Zhao, Zhe Hou, Jing Hao, Xiangbing Li, Yuxiang Zhao, Jinfang Yang, Jinbing Zhang |
| Quelle: |
2023 IEEE 3rd International Conference on Computer Systems (ICCS). :183-187 |
| Verlagsinformationen: |
IEEE, 2023. |
| Publikationsjahr: |
2023 |
| Publikationsart: |
Article |
| DOI: |
10.1109/iccs59700.2023.10335523 |
| Rights: |
STM Policy #29 |
| Dokumentencode: |
edsair.doi...........4f5e6ea52b6b1fbdae6fdbf3cee1ada0 |
| Datenbank: |
OpenAIRE |
Nájsť tento článok vo Web of Science