Optical Cantilever for High-Resolution Displacement Measurement Using Diffraction Grating and Sampling Moiré Method
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| Titel: | Optical Cantilever for High-Resolution Displacement Measurement Using Diffraction Grating and Sampling Moiré Method |
|---|---|
| Autoren: | Soya Sato, Toshihiro Shiratori, Tetsuo Kan, Hidetoshi Takahashi |
| Quelle: | IEEE Sensors Journal. 25:28119-28126 |
| Verlagsinformationen: | Institute of Electrical and Electronics Engineers (IEEE), 2025. |
| Publikationsjahr: | 2025 |
| Publikationsart: | Article |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2025.3581075 |
| Rights: | IEEE Copyright |
| Dokumentencode: | edsair.doi...........16a35c876141e717e8a2ffd73423a6dd |
| Datenbank: | OpenAIRE |
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