Optical Cantilever for High-Resolution Displacement Measurement Using Diffraction Grating and Sampling Moiré Method
Saved in:
| Title: | Optical Cantilever for High-Resolution Displacement Measurement Using Diffraction Grating and Sampling Moiré Method |
|---|---|
| Authors: | Soya Sato, Toshihiro Shiratori, Tetsuo Kan, Hidetoshi Takahashi |
| Source: | IEEE Sensors Journal. 25:28119-28126 |
| Publisher Information: | Institute of Electrical and Electronics Engineers (IEEE), 2025. |
| Publication Year: | 2025 |
| Document Type: | Article |
| ISSN: | 2379-9153 1530-437X |
| DOI: | 10.1109/jsen.2025.3581075 |
| Rights: | IEEE Copyright |
| Accession Number: | edsair.doi...........16a35c876141e717e8a2ffd73423a6dd |
| Database: | OpenAIRE |
Full Text Finder 
Nájsť tento článok vo Web of Science | ISSN: | 23799153 1530437X |
|---|---|
| DOI: | 10.1109/jsen.2025.3581075 |