Effect of fabrication parameters on the ferroelectricity of hafnium zirconium oxide films: A statistical study. - Salcedo, Guillermo A.; Islam, Ahmad E.; Reichley, Elizabeth; Dietz, Michael; Schubert-Kabban, Christine M.; Leedy, Kevin D.; Back, Tyson C.; Wang, Weisong; Green, Andrew; Wolfe, Timothy; Sattler, James M. (Journal of Applied Physics, 2024)