APA (7th ed.) Citation

Terborg, R., Kim, K. J., & Hodoroaba, V. (2023). Elemental composition and thickness determination of thin films by electron probe microanalysis. Surface & Interface Analysis: SIA, 55(6), 496-500. https://doi.org/10.1002/sia.7183

Chicago Style (17th ed.) Citation

Terborg, Ralf, Kyung Joong Kim, and Vasile‐Dan Hodoroaba. "Elemental Composition and Thickness Determination of Thin Films by Electron Probe Microanalysis." Surface & Interface Analysis: SIA 55, no. 6 (2023): 496-500. https://doi.org/10.1002/sia.7183.

MLA (9th ed.) Citation

Terborg, Ralf, et al. "Elemental Composition and Thickness Determination of Thin Films by Electron Probe Microanalysis." Surface & Interface Analysis: SIA, vol. 55, no. 6, 2023, pp. 496-500, https://doi.org/10.1002/sia.7183.