Hasuike, N., Maeda, T., & Takeda, M. (2022). Fabrication of ITO diffraction grating structure for infrared plasmonics by thermal nanoimprint lithography. Optical Review, 29(5), 450-455. https://doi.org/10.1007/s10043-022-00759-8
Chicago Style (17th ed.) CitationHasuike, Noriyuki, Takeshi Maeda, and Minoru Takeda. "Fabrication of ITO Diffraction Grating Structure for Infrared Plasmonics by Thermal Nanoimprint Lithography." Optical Review 29, no. 5 (2022): 450-455. https://doi.org/10.1007/s10043-022-00759-8.
MLA (9th ed.) CitationHasuike, Noriyuki, et al. "Fabrication of ITO Diffraction Grating Structure for Infrared Plasmonics by Thermal Nanoimprint Lithography." Optical Review, vol. 29, no. 5, 2022, pp. 450-455, https://doi.org/10.1007/s10043-022-00759-8.