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Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications.

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Název: Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications.
Autoři: Muttikulangara, Sanathanan S1 (AUTHOR) santhan001@e.ntu.edu.sg, Baranski, Maciej1 (AUTHOR), Miao, Jianmin1 (AUTHOR)
Zdroj: Journal of Micromechanics & Microengineering. Jul2025, Vol. 35 Issue 7, p1-11. 11p.
Témata: *DIFFRACTION gratings, *MICROELECTROMECHANICAL systems, *OPTICAL elements, *OPTICAL gratings, *MICROMACHINING
Abstrakt: This paper presents the development of a micromechanical rotary stepper motor with an integrated diffraction grating for miniaturized optical systems. The stepper motor is fabricated on a silicon-on-insulator wafer using micromachining techniques and provides precise, incremental rotation through electrostatic actuation, making it suitable for applications with relatively slow image sensors. The design incorporates a frictionless, flexure-based mechanism to ensure accurate operation and robust construction. A novel wafer-level replication technique enables the fabrication of customizable SU-8 diffraction gratings, including blazed profiles for enhanced light efficiency, which are seamlessly integrated with the micromotor. The diffraction grating is precisely bonded to the microactuator using a pick-and-place method with UV-curable adhesive, employing a high-precision stage and a micropipette dispensing system. Experimental characterization demonstrates reliable stepping motion and high-quality optical performance, establishing a practical approach for integrating reconfigurable optical elements with microelectromechanical systems actuators. [ABSTRACT FROM AUTHOR]
Databáze: Academic Search Index
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Abstrakt:This paper presents the development of a micromechanical rotary stepper motor with an integrated diffraction grating for miniaturized optical systems. The stepper motor is fabricated on a silicon-on-insulator wafer using micromachining techniques and provides precise, incremental rotation through electrostatic actuation, making it suitable for applications with relatively slow image sensors. The design incorporates a frictionless, flexure-based mechanism to ensure accurate operation and robust construction. A novel wafer-level replication technique enables the fabrication of customizable SU-8 diffraction gratings, including blazed profiles for enhanced light efficiency, which are seamlessly integrated with the micromotor. The diffraction grating is precisely bonded to the microactuator using a pick-and-place method with UV-curable adhesive, employing a high-precision stage and a micropipette dispensing system. Experimental characterization demonstrates reliable stepping motion and high-quality optical performance, establishing a practical approach for integrating reconfigurable optical elements with microelectromechanical systems actuators. [ABSTRACT FROM AUTHOR]
ISSN:13616439
DOI:10.1088/1361-6439/ade448