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Autoren: Ahmed S. Samra
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Schlagwörter: Lidar, Mechanical Engineering, Physics, FOS: Mechanical engineering, Laser, Optics, Diffraction grating, 7. Clean energy, Optical Frequency Combs and Ultrafast Lasers, Atomic and Molecular Physics, and Optics, Materials science, Laser Ranging, Engineering, Physics and Astronomy, Time-of-Flight Imaging Techniques, Physical Sciences, Beam (structure), Grating, Dimensional Metrology and Error Compensation, Instrumentation, Diffraction, Fiber Lasers, Laser beams
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Quelle: Applied Sciences (2076-3417); Jul2022, Vol. 12 Issue 13, pN.PAG-N.PAG, 31p
Schlagwörter: DIFFRACTION gratings, SURFACE structure, OPTICAL dispersion, LASER beams, LITHOGRAPHY
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Index Begriffe: coherent Fourier scatterometry, optical metrology, scatterometry, structured beam, journal article
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Journal of Optics (United Kingdom)--2040-8978--661c808f-8f8b-4119-953a-18e095284a93 -
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Quelle: ACS Applied Materials & Interfaces. 11:30163-30175
Schlagwörter: 02 engineering and technology, 0210 nano-technology
Zugangs-URL: https://tsukuba.repo.nii.ac.jp/record/54914/files/ACSAMI_11-33.pdf
https://pubmed.ncbi.nlm.nih.gov/31355627
https://tsukuba.repo.nii.ac.jp/records/54914
https://pubs.acs.org/doi/full/10.1021/acsami.9b04767
https://tsukuba.repo.nii.ac.jp/record/54914/files/ACSAMI_11-33.pdf
https://www.ncbi.nlm.nih.gov/pubmed/31355627
https://cir.nii.ac.jp/ja/crid/1050848249881398400
https://pubs.acs.org/doi/10.1021/acsami.9b04767
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