Search Results - "Scanning/Transmission Electron Microscopy and Ion Beam Analysis TaON"

Multi-techniques characterisation of anti-reflective Ta2O5 and TaOxNy thin films deposited by reactive sputtering: coupling X-ray photoelectron spectroscopy, scanning/transmission electron microscopy and ion beam analysis

Authors: Florian Chabanais Babacar Diallo Aissatou Diop et al.

Contributors: Florian Chabanais Babacar Diallo Aissatou Diop et al.

Source: Thin Solid Films. 825:140725

Subject Terms: [CHIM.MATE] Chemical Sciences/Material chemistry, Ion beam analysis, Sputtering, Concentrated Solar Thermal, Scanning/Transmission Electron Microscopy and Ion Beam Analysis TaON, Concentrated solar technology, Tantalum oxynidride, [PHYS] Physics [physics], Plasma processes, Multi-techniques characterisation of anti-reflective Ta2O5 and TaOxNy thin films deposited by reactive sputtering: coupling X-ray Photoelectron Spectroscopy Scanning/Transmission Electron Microscopy and Ion Beam Analysis TaON sputtering Plasma processes TEM XPS IBA Concentrated Solar Thermal, XPS, TEM, Multi-techniques characterisation of anti-reflective Ta2O5 and TaOxNy thin films deposited by reactive sputtering: coupling X-ray Photoelectron Spectroscopy, IBA, sputtering, X-ray photo electron spectroscopy, Transmission electron microscopy

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Access URL: https://hal.science/hal-05172348v1
https://hal.science/hal-05172348v1/document
https://doi.org/10.1016/j.tsf.2025.140725