Search Results - "Reactive sputtering"

Hybrid plasma model for reactive deposition of CrN thin films by deep oscillation magnetron sputtering.

Authors: Gao, J. Y. Ferreira, F. Lei, M. K.

Source: Journal of Applied Physics. 6/28/2025, Vol. 137 Issue 24, p1-20. 20p.

Subject Terms: *THIN film deposition, *REACTIVE sputtering, *SPUTTER deposition, *MAGNETRON sputtering, *CHEMICAL reactions

Reactive sputtering of vertically aligned vanadium oxide nanorods on an eco-friendly polymeric substrate for low-cost, flexible, and sustainable supercapacitors.

Authors: Rahman, Habeebur Lohan, Vijay Kaur, Davinder

Source: Applied Physics Letters. 9/15/2025, Vol. 127 Issue 11, p1-9. 9p.

Subject Terms: *REACTIVE sputtering, *SUPERCAPACITORS, *ENERGY storage, *WEARABLE technology, *MAGNETRON sputtering, *VANADIUM pentoxide

Large Area High‐Performance Thin Film Solid Oxide Fuel Cell with Nanoscale Anode Functional Layer by Scalable Reactive Sputtering.

Authors: Ju, Kyoungjae Oh, Seongkook Lee, Jong Hyuk et al.

Source: Advanced Science. 8/7/2025, Vol. 12 Issue 29, p1-10. 10p.

Subject Terms: *SOLID oxide fuel cells, *REACTIVE sputtering, *MECHANICAL efficiency, *POWER density, *MASS production, *LOW temperature engineering

Scandia-stabilized zirconia (ScSZ) cathode functional layer fabricated via DC reactive sputtering for low-temperature solid oxide fuel cells.

Authors: Park, Yongchan Lee, Sanghyeok Jeong, Davin et al.

Source: Ceramics International. Jul2025:Part B, Vol. 51 Issue 18, p26519-26525. 7p.

Subject Terms: *SOLID oxide fuel cells, *REACTIVE sputtering, *FUEL cells, *CHEMICAL kinetics, *INTERFACIAL resistance

Structure, chemistry, and mechanical properties of non-reactively sputtered Ti-Al-N

Authors: Bermanschläger, Sarah Christine Hajas, Balint Istvan Wojcik, Tomasz et al.

Source: Materials & design. 252

Subject Terms: Ti-Al-N, Non-reactive sputtering, Mechanical properties, Phase stability

File Description: electronic

Access URL: https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-553427
https://doi.org/10.1016/j.matdes.2025.113803

Structure evolution during growth of epitaxial NbN films on Al2O3 (0006) deposited by magnetron sputtering and its impact on electrical properties

Authors: Farhadizadeh, A. Salamania, J. Sortica, Mauricio A. et al.

Source: Journal of Crystal Growth. 656

Subject Terms: Niobium nitride, Reactive sputtering, Epitaxial growth, Morphology, Electrical conductivity

File Description: electronic

Access URL: https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-552033
https://doi.org/10.1016/j.jcrysgro.2025.128094

Large Built‐in Fields and Tunable Ferroelectricity in Composition‐Graded ScAlN Thin Films Deposited by Reactive Sputtering.

Authors: Nguyen, Tai Ghosh, Anirban Dao, Thang Duy et al.

Source: Advanced Science. 6/20/2025, Vol. 12 Issue 23, p1-10. 10p.

Subject Terms: *THIN films, *REACTIVE sputtering, *STRAY currents, *ELECTRIC fields, *FERROELECTRIC crystals, *HYSTERESIS loop, *FERROELECTRIC thin films

Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects.

Authors: Harada, Takayuki Ang, Zuin Ping Lily Sakakibara, Yuki et al.

Source: Applied Physics Letters. 6/2/2025, Vol. 126 Issue 22, p1-5. 5p.

Subject Terms: *VACUUM deposition, *REACTIVE sputtering, *SEMICONDUCTOR devices, *INTEGRATED circuits, *THIN films

Substrate Bias-Driven Structural and Mechanical Evolution of AlCrN and AlCrSiN Coatings via Reactive Magnetron Sputtering.

Authors: Tsai, Du-Cheng Huang, Rong-Hsin Chang, Zue-Chin et al.

Source: Materials (1996-1944). Apr2025, Vol. 18 Issue 7, p1671. 19p.

Subject Terms: *SUBSTRATES (Materials science), *REACTIVE sputtering, *MAGNETRON sputtering, *RADIO frequency, *GRAIN refinement

Advances in Enhancing the Wear Performance of Ti-6Al-4V Biomedical Alloy Through Nb 2 O 5 Coating.

Authors: Ferreira, Murilo Oliveira Alves Wolf, Witor Gelamo, Rogério Valentim et al.

Source: Materials (1996-1944). Apr2025, Vol. 18 Issue 7, p1593. 20p.

Subject Terms: *ORTHOPEDIC implants, *REACTIVE sputtering, *ARTIFICIAL implants, *ARTIFICIAL saliva, *NIOBIUM oxide

Effect of substrate and growth method on vanadium dioxide thin films by RF magnetron sputtering: Vanadium metal oxidation vs reactive sputtering.

Authors: Christensen, A. Posadas, A. B. Zutter, B. et al.

Source: Journal of Applied Physics. 7/7/2023, Vol. 134 Issue 1, p1-11. 11p.

Subject Terms: *REACTIVE sputtering, *THIN films, *MAGNETRON sputtering, *RADIOFREQUENCY sputtering, *PHASE transitions, *TRANSITION metals, *METAL-insulator transitions, *ZINC oxide films

Physicochemical model for reactive sputtering of a sandwich target.

Authors: Shapovalov, Viktor I.¹ (AUTHOR) vishapovalov@mail.ru

Source: Journal of Applied Physics. 2/28/2023, Vol. 133 Issue 8, p1-19. 19p.

Subject Terms: *REACTIVE sputtering, *REACTIVE flow, *GAS flow, *ALGEBRAIC equations, *VACUUM chambers

Effect of Annealing in Air on the Structural and Optical Properties and Efficiency Improvement of TiO 2 /Cu x O Solar Cells Obtained via Direct-Current Reactive Magnetron Sputtering.

Authors: Wisz, Grzegorz Sibiński, Maciej Łabuz, Mirosław et al.

Source: Materials (1996-1944). Feb2025, Vol. 18 Issue 4, p888. 16p.

Subject Terms: *SOLAR cell efficiency, *REACTIVE sputtering, *REFLECTANCE, *MAGNETRON sputtering, *BUFFER layers

Electrothermal enhancement of β-(AlxGa1−x)2O3/Ga2O3 heterostructure field-effect transistors via back-end-of-line sputter-deposited AlN layer.

Authors: Lundh, James Spencer Cress, Cory Jacobs, Alan G. et al.

Source: Journal of Applied Physics; 12/14/2024, Vol. 136 Issue 22, p1-11, 11p

Subject Terms: SPUTTER deposition, FIELD-effect transistors, THERMAL conductivity, REACTIVE sputtering, ELECTRIC fields

Reservoir computing and advanced synaptic plasticity of sputter-deposited ZnO memristors with controllable threshold and nonvolatile switching behavior.

Authors: Ismail, Muhammad Seo, Euncho Rasheed, Maria et al.

Source: Journal of Chemical Physics; 12/14/2024, Vol. 161 Issue 22, p1-11, 11p

Subject Terms: CONVOLUTIONAL neural networks, LONG-term potentiation, NEUROPLASTICITY, REACTIVE sputtering, BINARY codes

Reactive co-sputtered Li–Nb–O thin films with tunable ionic conductivity and dielectric properties for energy storage applications.

Authors: Jafarpour, Samaneh Naghshara, Hamid Zarenezhad, Hamaneh

Source: Scientific Reports; 10/29/2025, Vol. 15 Issue 1, p1-16, 16p

Subject Terms: IONIC conductivity, ENERGY storage, DIELECTRIC properties, LITHIUM niobate, SURFACE analysis, SOLID electrolytes, THIN films, REACTIVE sputtering

Effects of TaN Cap Layer on the Tribological and Antibacterial Properties of TaN-(Ag,Cu) Nanocomposite Thin Films.

Authors: Hsieh, Jang Hsing Dey, Anwesha Li, Chuan et al.

Source: Coatings (2079-6412); Oct2025, Vol. 15 Issue 10, p1175, 18p

Subject Terms: DIFFUSION barriers, WEAR resistance, NANOCOMPOSITE materials, NANOSTRUCTURES, REACTIVE sputtering, ANTIBACTERIAL agents, MECHANICAL wear, SILVER nanoparticles

Phase formation and electrical properties of reactively sputtered Fe1-x O thin films

Authors: Evertz, S. Nicolin, N. Cheng, N. et al.

Source: Journal of Physics D. 57(6)

Subject Terms: wustite, physical vapor deposition, reactive sputtering, electrical properties

File Description: electronic

Access URL: https://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-517494
https://doi.org/10.1088/1361-6463/ad0a3e

Controlling the Composition of Mo–Si–N–O Thin Films in Reactive Magnetron Sputtering.

Authors: Gromov, D. G. Gavrilov, S. A. Lebedev, E. A. et al.

Source: Russian Microelectronics. Dec2024, Vol. 53 Issue 7, p641-649. 9p.

Subject Terms: *REACTIVE sputtering, *MAGNETRON sputtering, *THIN films, *KINETIC theory of gases, *NITRIDATION

Design and reactive magnetron sputtering of thermochromic coatings.

Authors: Houska, Jiri¹ (AUTHOR) jhouska@kfy.zcu.cz

Source: Journal of Applied Physics. 3/21/2022, Vol. 131 Issue 11, p1-17. 17p.

Subject Terms: *REACTIVE sputtering, *SURFACE coatings, *ELECTROCHROMIC windows, *TRANSITION temperature, *SOLAR energy, *MAGNETRON sputtering