Výsledky vyhledávání - "Multiscale computational fluid dynamics modeling"

Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method

Autoři: Henrik Wang Matthew Tom Feiyang Ou a další

Zdroj: Digital Chemical Engineering, Vol 10, Iss , Pp 100140- (2024)

Témata: Multiscale computational fluid dynamics modeling, Semiconductor manufacturing processes, Area-selective atomic layer deposition, Reactor optimal design, Reactor optimal operation, Chemical engineering, TP155-156, Information technology, T58.5-58.64

Popis souboru: electronic resource

Relation: http://www.sciencedirect.com/science/article/pii/S2772508124000024; https://doaj.org/toc/2772-5081

Přístupová URL adresa: https://doaj.org/article/3b4258489cd94fc798dd1962f6aa22c0