Search Results - "Gas phase etching"

Selective gas phase pulsed etching of oxides with NbCl5

Authors: Juha Ojala Marko Vehkamäki Mykhailo Chundak et al.

Contributors: Juha Ojala Marko Vehkamäki Mykhailo Chundak et al.

Source: Journal of Materials Chemistry C. 13:2347-2355

Subject Terms: Etching, Chemical sciences, Gas phase etching, Al3O2, 0103 physical sciences, Mechanisms, Ta2o5, ZrO2, isotropic etching, 02 engineering and technology, 0210 nano-technology, 01 natural sciences, Films

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Access URL: http://hdl.handle.net/10138/589493

Selective gas phase pulsed etching of oxides with NbCl5

Authors: Ojala, Juha Vehkamaeki, Marko Chundak, Mykhailo et al.

Contributors: Ojala, Juha Vehkamaeki, Marko Chundak, Mykhailo et al.

Subject Terms: Gas phase etching, Ta2o5, Mechanisms, Etching, Al3O2, Films, ZrO2, isotropic etching, Chemical sciences

File Description: application/pdf

Relation: Ojala , J , Vehkamaeki , M , Chundak , M , Vihervaara , A , Mizohata , K & Ritala , M 2024 , ' Selective gas phase pulsed etching of oxides with NbCl 5 ' , Journal of Materials Chemistry C . https://doi.org/10.1039/d4tc03488k; http://hdl.handle.net/10138/589493; 85211637422; 001372070600001

Availability: http://hdl.handle.net/10138/589493

Nanoscopic tip sensors fabricated by gas phase etching of optical glass fibers

Authors: Bierlich, J. Kobelke, J. Brand, D. et al.

Source: Photonic Sensors

Subject Terms: ddc:620, Doping, Gas phase etching, Metal coating, Nanoprobes, Optical fiber tips, Tip shaping, All fiber, Annealing treatments, Boron-doped, Dopant concentrations, Etching gas, Etching rate, Fiber tip, Imaging applications, Nanoscaled, New applications, Sensor applications, Sensor designs, Silica fibers, Silica-based fibers, Silver layer, Step-index fibers, Surface plasmons, Technical implementation, Tip radius, Vapour deposition, Doping (additives), Etching, Fluorine

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Relation: https://doi.org/10.34657/4531; https://oa.tib.eu/renate/handle/123456789/5902

Availability: https://oa.tib.eu/renate/handle/123456789/5902
https://doi.org/10.34657/4531

Dual Redox Reaction Sites for Pseudocapacitance Based on Ti and -P Functional Groups of Ti 3 C 2 PBr x MXene.

Authors: Zhu J Zhu S Cui Z et al.

Source: Angewandte Chemie (International ed. in English) [Angew Chem Int Ed Engl] 2024 Jul 01; Vol. 63 (27), pp. e202403508. Date of Electronic Publication: 2024 May 27.

Publication Type: Journal Article

Journal Info: Publisher: Wiley-VCH Country of Publication: Germany NLM ID: 0370543 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1521-3773 (Electronic) Linking ISSN: 14337851 NLM ISO Abbreviation: Angew Chem Int Ed Engl Subsets: PubMed not MEDLINE; MEDLINE