Search Results - "EPITAXIAL layers"

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    Alternate Title: Impacts of Hot Wall CVD Process Conditions on Thickness Uniformity of 8-Inch SiC Epitaxial Layer.

    Authors: 鹿润林 郑丽丽 张辉 et al.

    Source: Journal of Synthetic Crystals. Sep2025, Vol. 54 Issue 9, p1509-1524. 16p.

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