Výsledky vyhľadávania - "Britun, Nikolay"

Pseudo‐Wet Plasma Mechanism Enabling High‐Throughput Dry Etching of SiO2 by Cryogenic‐Assisted Surface Reactions.

Autori: Hsiao, Shih‐Nan Sekine, Makoto Britun, Nikolay a ďalší

Zdroj: Small Methods; Dec2024, Vol. 8 Issue 12, p1-6, 6p

Predmety: PLASMA etching, FOURIER transform infrared spectroscopy, RADICAL ions, SEMICONDUCTOR manufacturing, SEMICONDUCTOR devices

Erratum: "Optical spectroscopy for sputtering process characterization" [J. Appl. Phys. 127, 211101 (2020)].

Autori: Britun, Nikolay Hnilica, Jaroslav

Zdroj: Journal of Applied Physics; 8/14/2024, Vol. 136 Issue 6, p1-1, 1p

Predmety: ELECTRONIC excitation, OPTICAL spectroscopy, BOOK titles, APOLOGIZING, LOGARITHMS

Optical actinometry for number density measurements in low-pressure plasmas: Advantages, error sources, and method validation.

Autori: Britun, Nikolay Mo, Michael K. T. Hsiao, Shih-Nan a ďalší

Zdroj: Journal of Applied Physics; 9/21/2024, Vol. 136 Issue 11, p1-19, 19p

Predmety: OPTICAL measurements, HIGH-frequency discharges, PLASMA flow, OPTICAL resolution, DENSITY

Optical spectroscopy for sputtering process characterization.

Autori: Britun, Nikolay Hnilica, Jaroslav

Zdroj: Journal of Applied Physics; 6/7/2020, Vol. 127 Issue 21, p1-21, 21p, 7 Diagrams, 17 Graphs

Predmety: OPTICAL spectroscopy, LIGHT absorption, LASER interferometry, INTERFEROMETRY, LASER-induced fluorescence, MAGNETRONS, SPECTRUM analysis

Diagnostics of a nanosecond atmospheric plasma jet. Ionization waves, plasma density and electric field dynamics.

Autori: Britun, Nikolay Dennis Christy, Peter Raj Gamaleev, Vladislav a ďalší

Zdroj: Journal of Applied Physics; May2023, Vol. 133 Issue 18, p1-16, 16p

Predmety: ELECTRIC charge, PLASMA jets, ELECTRIC fields, PLASMA density, SPACE charge, ELECTRON density

Investigation of nitrogen fixation in low-pressure microwave plasma via rotational–vibrational NO and N2 kinetics.

Autori: Samadi Bahnamiri, Omid Manaigo, Filippo Chatterjee, Abhyuday a ďalší

Zdroj: Journal of Applied Physics; 3/21/2023, Vol. 133 Issue 11, p1-14, 14p

Predmety: NITROGEN fixation, MICROWAVE plasmas, EMISSION spectroscopy, HIGH-frequency discharges, OPTICAL spectroscopy, ENERGY transfer, GLOW discharges

Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects.

Autori: Hnilica, Jaroslav Klein, Peter Vašina, Petr a ďalší

Zdroj: Journal of Applied Physics; 7/28/2020, Vol. 128 Issue 4, p1-12, 12p, 5 Diagrams, 2 Charts, 8 Graphs

Predmety: PARTICLE dynamics, MAGNETRON sputtering, VECTOR data, GAS wells

Revisiting particle dynamics in HiPIMS discharges. I. General effects.

Autori: Hnilica, Jaroslav Klein, Peter Vašina, Petr a ďalší

Zdroj: Journal of Applied Physics; 7/28/2020, Vol. 128 Issue 4, p1-14, 14p, 3 Diagrams, 4 Charts, 9 Graphs

Predmety: MAGNETRON sputtering, PARTICLE dynamics

Quantification of the hysteresis and related phenomena in reactive HiPIMS discharges.

Autori: Britun, Nikolay Konstantinidis, Stephanos Belosludtsev, Alexandr a ďalší

Zdroj: Journal of Applied Physics; 2017, Vol. 121 Issue 17, p1-10, 10p, 2 Diagrams, 2 Charts, 7 Graphs

Predmety: MAGNETRON sputtering, HYSTERESIS, ATOMIC emission spectroscopy, ARGON, OXYGEN, SPUTTERING (Physics), EQUIPMENT & supplies

Study of Ar and Ar-CO2 microwave surfaguide discharges by optical spectroscopy.

Autori: Silva, Tiago Britun, Nikolay Godfroid, Thomas a ďalší

Zdroj: Journal of Applied Physics; 5/7/2016, Vol. 119 Issue 17, p1-9, 9p, 1 Diagram, 1 Chart, 9 Graphs

Predmety: HIGH-frequency discharges, OPTICAL spectroscopy, ARGON, CARBON dioxide, ELECTROMAGNETIC waves, ELECTRON temperature, ELECTRON density, METASTABLE states

Particle visualization in high-power impulse magnetron sputtering. II. Absolute density dynamics.

Autori: Britun, Nikolay Palmucci, Maria Konstantinidis, Stephanos a ďalší

Zdroj: Journal of Applied Physics; 2015, Vol. 117 Issue 16, p163303-1-163303-15, 15p, 5 Diagrams, 3 Charts, 11 Graphs

Predmety: MAGNETRON sputtering, ARGON, TITANIUM, ELECTRON density, ABSORPTION spectra

Particle visualization in high-power impulse magnetron sputtering. I .2D density mapping.

Autori: Britun, Nikolay Palmucci, Maria Konstantinidis, Stephanos a ďalší

Zdroj: Journal of Applied Physics; 2015, Vol. 117 Issue 16, p163302-1-163302-17, 17p, 13 Diagrams, 2 Charts, 6 Graphs

Predmety: MAGNETRON sputtering, ARGON, TITANIUM, ELECTRON density, LASER-induced fluorescence, DOPPLER effect

Boosting the dissociation of CO2 by employing shock‐free supersonic expansion.

Autori: Khaji, Maryam Britun, Nikolay Degrez, Gérard a ďalší

Zdroj: Plasma Processes & Polymers; Feb2022, Vol. 19 Issue 2, p1-18, 18p

Predmety: CARBON dioxide, HIGH temperatures

Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H2 plasma at different substrate temperatures.

Autori: Hsiao, Shih‐Nan Britun, Nikolay Nguyen, Thi‐Thuy‐Nga a ďalší

Zdroj: Plasma Processes & Polymers; Nov2021, Vol. 18 Issue 11, p1-10, 10p

Predmety: PLASMA-enhanced chemical vapor deposition, RUTHERFORD backscattering spectrometry, CHEMICAL vapor deposition, ETCHING, HYDROGEN

Evidence of near-the-limit energy cost NO formation in atmospheric spark discharge.

Autori: Britun, Nikolay Gamaleev, Vladislav Hori, Masaru

Zdroj: Plasma Sources Science & Technology; Aug2021, Vol. 30 Issue 8, p1-6, 6p

Predmety: ENERGY industries, HEAT of reaction, HEAT of formation, GLOW discharges, THERMOCHEMISTRY, LASER-induced fluorescence, NITROGEN fixation, ATMOSPHERIC nucleation

N2 oxidation kinetics in a ns-pulsed discharge above a liquid electrode.

Autori: Gromov, Mikhail Leonova, Kseniia De Geyter, Nathalie a ďalší

Zdroj: Plasma Sources Science & Technology; Jun2021, Vol. 30 Issue 6, p1-14, 14p

Predmety: OXIDATION kinetics, NITROGEN fixation, FLUORESCENCE spectroscopy, EXCITED states, ATMOSPHERIC pressure, LASER-induced fluorescence

Nitrogen fixation in pulsed microwave discharge studied by infrared absorption combined with modelling.

Autori: Bahnamiri, Omid Samadi Verheyen, Claudia Snyders, Rony a ďalší

Zdroj: Plasma Sources Science & Technology; Jun2021, Vol. 30 Issue 6, p1-15, 15p

Predmety: HIGH-frequency discharges, INFRARED absorption, GAS flow, SPECIFIC gravity, NUMBERS of species, NITROGEN fixation, MICROWAVE spectroscopy

Studying the plasma‐assisted polymerization at atmospheric pressure in Ar/TEOS by active laser diagnostics.

Autori: Barletta, Federica Britun, Nikolay Leys, Christophe a ďalší

Zdroj: Plasma Processes & Polymers; Feb2021, Vol. 18 Issue 2, p1-15, 15p

Predmety: ATMOSPHERIC pressure, PLASMA jets, POLYMERIZATION, LASER-induced breakdown spectroscopy, FLUORESCENCE spectroscopy, OXYGEN, LASER-induced fluorescence

Rarefaction windows in a high-power impulse magnetron sputtering plasma.

Autori: Palmucci, Maria Britun, Nikolay Konstantinidis, Stephanos a ďalší

Zdroj: Journal of Applied Physics; Sep2013, Vol. 114 Issue 11, p113302, 9p, 2 Diagrams, 3 Charts, 5 Graphs, 1 Map

Predmety: MAGNETRON sputtering, MAGNETRONS, FLUORESCENCE spectroscopy, TITANIUM, CATHODES

Insights into plasma‐assisted polymerization at atmospheric pressure by spectroscopic diagnostics.

Autori: Barletta, Federica Leys, Christophe Colombo, Vittorio a ďalší

Zdroj: Plasma Processes & Polymers; Jun2020, Vol. 17 Issue 6, p1-15, 15p

Predmety: ATMOSPHERIC pressure, PLASMA polymerization, PLASMA jets, EMISSION spectroscopy, RAYLEIGH scattering, OPTICAL spectroscopy